| Product Description |
Chapman Instruments MP 2000 Plus non-contact surface profiling system for semi-automated wafer topography measurement.
Specifications:
Nomarski Viewing System for high definition visual inspection
Non-contact scanning line profiles
Non-contact 3D Scans
Sub0Angstrom Height Resolution
0.5µm lateral resolution
Scan lengths ranging from microns to 100mm
Automated sample positioning X,Y, theta
Includes ULWD MSPlan 20x. This system powers up but no further testing has been done.
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