Metrology / Profilometers

Veeco Wyko HD 3300 Profiling System, a non-contact
optical profiler, utilizes two technologies to measure a
wide range of surface heights. Phase-shifting interferometry (PSI) allows measurement of smooth surfaces and small steps, while vertical scanning interferometry (VSI) allows measurement of rough surfaces and steps up to several millimeters high.

Veeco Wyko HD-3300 Optical Profiler consisting of:

- Model: HD3300
- Capable of handling up to 8"/200mm wafers
- Non contact sub-micron Optical Profiler for 3D Surface Metrology
- 8” Auto XY with 0.5 uM encoder / Auto TT
- PC Computer with Windows XP Software and Stitching,
-Wyko Vision 32 Software
- Vertical resolution as low as 0.1 nm
- XY Tilt
- Motorized Z
– Axis Focus
- Fast Z Focus
- Pentium computer system & Windows XP
- Keyboard controller with trackball & Joystick
- 0.1um resolution XY table with 63.5mm x 63.5mm bondable area
- IX-5 Interferometric objective
- IX-50 Interferometric objective
-Alignment FOV lens
- 0.40X FOV lens
-0.75X FOV lens
- 1.0X FOV lens
- System Monitor
- Vibration Isolation Table