Metrology / Profilometers

VLSI Step Height Quartz Standard

Manufacturer: VLSI
Price: $1,000.00
Part #:
This Product is: USED
Weight: 1.00 lbs
In Stock: Yes - (5 Items)
Product Description

VLSI Step Height Quartz Standard

Material - Step etched in quartz (chrome-coated)
Step Height - 180nm
Size - 25mm x 25mm x 3mm
Traceability - NIST
Product Range 80 Å to 50µm
 

Product Specification

TAKING CALIBRATION A STEP FORWARD. Step Height Standards (SHS) are designed to calibrate mechanical or optical surface profilers. These standards consist of a 25 mm x 25 mm x 3 mm quartz block with a precisely etched uniform bar along with various test and diagnostic features. The choice of the material for manufacturing the standard-an ultra smooth quartz photomask blank-assures a very flat and smooth working surface as well as parallelism of the top and bottom surface within a few seconds of arc.