| Product Specification |
This spherical mirror was removed from a Perkin Elmer wafer stepper utilized for the manufacturing of semiconductors. The diameter of the mirror is 18.5", the thickness is 4.1" and the SAG is 1.7". Please see the diamgrams for complete measurements. Manufactured to the highest surface accuracy possible (reported to be 1/80 wave). The Zerodur material for this mirror was selected to be bubble free and of the highest grade. A Zerodur blank this size is in excess of $7500.00 alone. The mirror mount is made of stainless steel and has 8 mounting studs around the outside diameter. The dimensions shown are for the mirror only.
Use this mirror as a super interferometer test mirror or regrind the radius for a longer focal length. The mirror can be removed from the mount. The mount alone is 66lbs. This mirror appears to be in excellent cosmetic condition.
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