| Product Description |
When it comes to isolating higly sensitive equipment from troublesome vibrations, the TMC STACIS 2000 system stands alone. The STACIS 2000 active vibration control system offers the world’s most advanced vibration control solution. With isolation starting at 0.3 Hz, the STACIS 2000 system provides the widest band of vibration isolation available, capable of isolating sensitive equipment from vibrations at any relevant frequency. With the STACIS 2000 system, you can locate your sensitive machines and equipment virtually anywhere within a fabrication site – without suffering the effects of minute vibrations such as those from passing workers, air handling systems or nearby machinery. For example, chip manufacturers can produce higher-density chips and achieve higher yields, along with reduced process cycle times and lower cost per chip. What’s more, this robust, advanced system is easy to use and simple to install. The revolutionary design of the STACIS 2000 system combines active vibration control based on piezoelectric actuators with proven passive isolation technology. The main components of the system are a user interface controller and three to four active, independent isolators positioned under the equipment they serve. Each isolator houses five piezoelectric actuators and a passive rubber mount 100 times stiffer than standard pneumatic isolators. The actuators control vibration along all three axes. The piezoelectric actuators receive information on disturbances through absolute velocity sensors. This information from the sensors causes the actuators to expand or contract as required, moving out of the way of vibration and diminishing its impact. STACIS is ideal for supporting semiconductor inspection and manufacturing equipment both at the point of use and OEM applications. |
